Effects of Mn doping on structural and dielectric properties of sol-gel-derived (Ba0.835Ca0.165)(Zr0.09Ti0.91)O3 thin films

► Mn doped (Ba,Ca)(Zr,Ti)O3 (BCZT) films were prepared by sol-gel method. ► Mn doping effects on structure and dielectric properties of BCZT films. ► The Mn doped BCZT films show high dielectric tunability. ► The films have moderate dielectric constant and low dielectric loss. ► The films are suitable for tunable microwave device applications.