Composition profiles and adhesion evaluation of conductive diamond coatings on dielectric ceramics

► Boron-doped polycrystalline diamond films were grown on Si3N4 ceramic substrates. ► System pressure and CH4/H2 flow ratio influence the films' electrical conductivity. ► Boron and silicon impurities as well as C2H3+ are incorporated in the films. ► Si3N4 substrates guaranteed high adhesion levels to boron-doped diamond films.