کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10670012 1008846 2012 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Simple optical method to determine the porosity of porous silicon films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Simple optical method to determine the porosity of porous silicon films
چکیده انگلیسی
A simple optical method to estimate the porosity of microporous silicon films is described. The technique relies upon determination of film refractive index via measurement of the incident (Brewster) angle corresponding to a minimum in the intensity of light reflected from the air-film interface. The sample porosity is then obtained using an effective medium model. Porosities obtained using this method show general agreement with those obtained using gravimetric means and, where comparison was possible, excellent agreement with those of similarly-prepared films found by low angle X-ray reflectivity. These results confirm the general applicability of this technique to the determination of microporous silicon film porosity.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 520, Issue 7, 31 January 2012, Pages 2526-2531
نویسندگان
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