The effect of annealing on structural, electrical and optical properties of nanostructured ZnS/Ag/ZnS films

In this paper a ZnS/Ag/ZnS (ZAZ) nano-multilayer structure is designed theoretically and optimum thicknesses of ZnS and Ag layers are calculated at 35 and 17 nm, respectively. Several conductive transparent ZAZ nano-multilayer films are deposited on a glass substrate at room temperature by thermal evaporation method. Changes in the electrical, structural, and optical properties of samples are investigated with respect to annealing in air at different temperatures. High-quality nano-multilayer films with the sheet resistance of 8 Ω/sq and the optical transmittance of 83% at 200 °C annealing temperature are obtained. The figure of merit is applied on the ZAZ films and their performance as transparent conductive electrodes are determined.