Electrostatic spray pyrolysis of LiNi0.5Mn1.5O4 films for 3D Li-ion microbatteries

► Electrostatic spray pyrolysis for 1-step Li-ion micro battery electrode deposition. ► LiNi0.5Mn1.5O4 thin film electrodes. ► Electrochemical performances related to the film texture. ► Controlled deposition on flat and 3D substrate.