کد مقاله کد نشریه سال انتشار مقاله انگلیسی ترجمه فارسی نسخه تمام متن
1663737 1517994 2016 6 صفحه PDF سفارش دهید دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of reacting gas content on structural and electro-physical properties of nanostructured diamond films grown by chemical vapor deposition with crossed E/H field glow discharge stabilization
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موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Influence of reacting gas content on structural and electro-physical properties of nanostructured diamond films grown by chemical vapor deposition with crossed E/H field glow discharge stabilization
چکیده انگلیسی


• The method and setup for polycrystalline diamond films deposition are presented.
• DC glow discharge stabilized by crossed E/H field was used.
• The nanostructure formation was realized by N2 addition to Ar/CH4/H2 plasma.
• The detailed study of electro-physical, morphological and structural properties was done.
• The data of electro-physical measurements good correlate with the optical ones.

The method and setup for polycrystalline diamond films deposition from the gas-phase using the direct current (DC) glow discharge stabilized by crossed E/H field are presented. The mentioned method was used for the preparation of nanostructured diamond films. The nanostructure formation was realized by N2 addition to Ar/CH4/H2 plasma. The detailed study of electro-physical, morphological and structural properties was done using simple two-electrodes scheme of resistivity measurements, atomic force and scanning electron microscopies as well as Raman spectroscopy. The data of electro-physical measurements is in good correlation with the data of optical measurements and complement each other showing the complete picture of the processes of modification of the diamond films structure induced by nitrogen atoms incorporation.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 616, 1 October 2016, Pages 297–302
نویسندگان
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