کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1664836 | 1518021 | 2015 | 4 صفحه PDF | دانلود رایگان |
• A sol–gel spin coating method was developed for the fabrication of BZY thin films.
• The processing temperature was much lower compared to powder-based sintering.
• Sub-micrometer scale BZY thin film with well-controlled stoichiometry was obtained.
A modified sol–gel process was developed for the fabrication of sub-micrometer scale yttrium-doped barium zirconate (BZY) thin film at much lower processing temperatures. The film was fabricated by direct spin-coating of the sol on a Si3N4 passivated Si substrate, followed by low temperature thermal annealing at 1000 °C, and single BZY phase without barium carbonate residue was obtained. A 200 nm-thick thin film without obvious through-film cracks was fabricated with optimized process parameters of sol concentration and heating rate. The stoichiometry of the BZY thin film was well-controlled and no Ba evaporation was observed due to the low processing temperature. The combination of sol–gel and spin coating method can be a promising alternative to vacuum-based thin film deposition techniques for the fabrication of sub-micrometer scale BZY thin film.
Journal: Thin Solid Films - Volume 584, 1 June 2015, Pages 116–119