کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1665348 | 1518036 | 2014 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Structural and electrical properties of Nb-doped TiO2 films sputtered with plasma emission control
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Structural and electrical properties of Nb-doped TiO2 films sputtered with plasma emission control Structural and electrical properties of Nb-doped TiO2 films sputtered with plasma emission control](/preview/png/1665348.png)
چکیده انگلیسی
A technique to deposit Nb-doped films of TiO2 by radio-frequency magnetron sputtering was investigated. Nb wires are put onto the sputter track of a metallic titanium target and the oxidation state of the target is controlled by the intensity of a Ti line from the plasma emission. The sputtered films are analyzed with X-ray diffraction, RBS (Rutherford back scattering), energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy and SEM (scanning electron microscopy). After post-heating at 400 °C, all films exhibit the anatase structure. The films are polycrystalline with a Nb/[Nb + Ti] content from 2 to 17 at.%. RBS and SEM indicate that the films consist of two sub-layers with the surface layer containing more Nb and exhibiting a clearer columnar structure. There is an optimum oxidation state of the target in the transition region between metallic and oxidic modes where the lowest resistivity of 7 Ã 10â 4 Ωcm is achieved. Nb is incorporated as Nb5 + into the anatase lattice, but in suboptimal films, Ti vacancies (acceptors) may compensate the donor effect of Nb. The oxygen content in the films is higher than for stoichiometric TiO2. O interstitials may increase the mass density of the films. The lattice parameter a and the unit cell volume increase with the Nb content in a similar manner as observed for single crystals of TiO2:Nb.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 568, 1 October 2014, Pages 94-101
Journal: Thin Solid Films - Volume 568, 1 October 2014, Pages 94-101
نویسندگان
S.K. Mukherjee, H.W. Becker, A.P. Cadiz Bedini, A. Nebatti, C. Notthoff, D. Rogalla, S. Schipporeit, A. Soleimani-Esfahani, D. Mergel,