Electron beam deposited Nb-doped TiO2 toward nanostructured transparent conductive thin films

► Nb-doped TiO2 sol-gel materials were electron beam evaporated into thin films. ► Thin film Nb-content was correlated with sol-gel Nb-content. ► Transparency and conductivity were related to substrate temperature and Nb-content. ► Nanopillar Nb-doped TiO2 films were fabricated by glancing angle deposition.