Investigation of morphological and electrical characteristics of tin doped indium oxide layers produced by a quasi single source precursor system

► A quasi single source precursor system enables one-step heat treatment of layers. ► Thereby less pronounced texture and lower tensile residual stress were obtained. ► The layers show hardly any fluctuations in the thickness. ► The electrical conductivity could be increased. ► Optical performance in terms of transmission (vis) and IR reflection was increased.