Growth of stoichiometric indium sulfide films by thermal evaporation: Influence of vacuum annealing on structural and physical properties

► Stoichiometric indium sulfide films are prepared by thermal evaporation. ► Films acquire crystallinity on annealing in vacuum. ► No perceptible change in atomic composition during annealing up to 500 °C ► Vacuum annealing brings about changes in optical and electrical properties.