Auto-organizing ZrAlN/ZrAlTiN/TiN multilayers

The possibility to form secondary phases during annealing of a two-phase ternary nitride material is studied. By the use of an initial multilayer structure the new phase forms at the sublayer interfaces, resulting in an enhanced layering of the film. This is illustrated by a ZrAlN/TiN thin film where formation of a cubic structure ZrTi(Al)N phase at the sublayer interfaces improves the mechanical properties after annealing above 900 °C.

► Formation of secondary phases during annealing of multilayer thin films is studied.
► Secondary phase formation at sublayer interfaces increases the layering of the film.
► The increased layering improves the mechanical properties of the annealed film.
► In ZrAlN/TiN multilayers, cubic structure ZrTi(Al)N forms above 900 °C.
► Formation of ZrTi(Al)N at the interfaces results in increased hardness of the film.