High quality amorphous indium zinc oxide thin films synthesized by pulsed laser deposition

Indium zinc oxide films were grown from targets with two different In atomic concentration [In/(In + Zn)] of 40% and 80% by the pulsed laser deposition technique on glass substrates from room temperature up to 100 °C. X-ray diffraction and reflectometry investigations showed that films were amorphous and dense. Thin films (thickness < 100 nm) exhibited higher optical transmittance and resistivities than thick films (thickness > 1000 nm), probably caused by a significant decrease of oxygen vacancies due to atmosphere exposure. Films deposited from the In rich target under an oxygen pressure of 1 Pa exhibited optical transmittance higher than 85%, resistivities around 5– 7 × 10− 4 Ω cm and mobilities in the 47–54 cm2/V s range.