کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1667693 | 1008856 | 2011 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Surface characterization and nanomechanical properties of diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition Surface characterization and nanomechanical properties of diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition](/preview/png/1667693.png)
Diamond-like carbon (DLC) films were synthesized by RF plasma enhanced chemical vapor deposition using acetylene as the carbon source and the effects of acetylene/nitrogen ratio in the reaction atmosphere, deposition pressure, and plasma post-treatment using different atmospheres on the surface roughness and mechanical properties of DLC films were investigated. Although the surface roughness, characterized by AFM, decreased as the acetylene/nitrogen ratio in the reaction atmosphere decreased, the hardness of DLC films measured by nanoindentation also decreased with the decrease of the acetylene/nitrogen ratio, which is consistent with the Raman results of the ID/IG ratio. Rougher films with higher residual stress were obtained when using a deposition pressure higher than 40.0 Pa (0.3 torr). For the effect of plasma post-treatment using different atmospheres, surface smoothing was found for the hydrogen plasma post-treatment, whereas nitrogen and argon plasma post-treatments resulted in surface roughening. Hydrogen plasma post-treatment was found to lower the surface roughness without significantly sacrificing the hardness.
Journal: Thin Solid Films - Volume 519, Issue 15, 31 May 2011, Pages 4870–4873