کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1670230 1008897 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Structural properties of epitaxial SrHfO3 thin films on Si (001)
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Structural properties of epitaxial SrHfO3 thin films on Si (001)
چکیده انگلیسی

Thin films of SrHfO3 have been grown by MBE on Si (001). Synchrotron X-ray diffraction (XRD) and grazing incidence extended X-ray absorption spectroscopy (GI-EXAFS) were employed to elucidate the epitaxial relationship between the SrHfO3 and Si (001). The SrHfO3 film was unstrained and exhibited a lattice mismatch of 6% with silicon; the orientation was SrHfO3(001)[110] || Si(001)[100]. The SrHfO3 (200) plane demonstrated the expected four fold symmetry with a peak positioned every 90° in the phi scan of X-ray diffraction. Excellent fits of the GI-EXAFS showed that Hf was coordinated to about 6 oxygen atoms at a bonding distance of 2.080 Å and about 8 Sr neighbors at 3.53 Å. The short range order determined by GI-EXAFS corroborated the long range order determined by XRD, where nearly epitaxial growth, good crystalline quality, low disorder and minimal defects observed make SrHfO3 a viable dielectric candidate in Si based complementary metal-oxide-semiconductor field effect transistors.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 6, Supplement 1, 1 January 2010, Pages S118–S122
نویسندگان
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