Preparation of Magnéli phases of Ti27O52 and Ti6O11 films by laser chemical vapor deposition

Magnéli phases of Ti27O52 and Ti6O11 films were prepared by laser chemical vapor deposition using Ti(dpm)2(O-i-Pr)2 as a precursor. Ti6O11 film was obtained at a laser power (PL) of 200 W and a deposition temperature (Tdep) of 1270 K. Ti27O52 film was obtained at PL = 150 to 200 W and Tdep = 1120 to 1250 K. Ti6O11 and Ti27O52 films had a faceted texture about 2 μm in grain size and a columnar cross section. The deposition rate of Ti27O52 and Ti6O11 films were 90 and 70 μm h− 1, respectively.