کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1670825 1008905 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Difference of deposition process of an amorphous carbon film due to source gases
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Difference of deposition process of an amorphous carbon film due to source gases
چکیده انگلیسی

We compared the deposition process of an amorphous carbon film using acetylene as a source gas with the deposition process using methane. The process was investigated by using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS). The infrared spectra showed that sp3-hydrocarbon species was observed in both cases: on the other hand, the sp- and sp2-carbon and/or hydrocarbon species was clearly observed in the film deposited using acetylene. Moreover, we observed the changes in predominant adsorbed species with film thickness in both cases; these facts suggest that an amorphous carbon film grows with the structural changes of adsorbed species in both deposition processes.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 13, 30 April 2010, Pages 3497–3501
نویسندگان
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