کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1670988 | 1008908 | 2010 | 6 صفحه PDF | دانلود رایگان |
Here we report efforts to understand the competitive roles of film thickness (up to ∼ 650 nm) and growth rate (up to ∼ 190 nm/min) in spray pyrolytically deposited fluorine-doped tin dioxide films. This was achieved by varying the time of deposition and/or the precursor concentration. Film properties were investigated using X-ray diffraction technique and Hall effect measurements. The thickness evolution involved textured growth along [200] orientation followed by a secondary prominence of [110] and [101] orientations. The growth rate induced effects accelerated this change. The carrier concentration and carrier mobility showed that the [200] oriented growth is technologically advantageous and can be obtained using a wider growth rate range ∼ 50–130 nm/min.
Journal: Thin Solid Films - Volume 518, Issue 17, 30 June 2010, Pages 4868–4873