Integrated diagnostics of magnetron sputtering discharge

Fabry-Perot interferometry, laser induced fluorescence, and optical absorption spectroscopy were utilized to study a magnetron discharge during sputtering of the Ti and Cu targets. Doppler broadening of Ar and Ti emission lines was measured by the Fabry-Perot interferometer in a wide range of working pressure and at different power applied to the discharge. The temperatures of Ar and Ti atoms were determined by the Doppler broadening of the correspondent emission lines. Laser induced fluorescence was applied for Ti and Ti+ density determination in the same reactor. The absolute values of the Ti density in the discharge are provided based on the results done by optical absorption spectroscopy.