کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1671379 | 1008915 | 2010 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Dopant incorporation in thin strained Si layers implanted with Sb
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The effect of tensile strain on Sb incorporation in Si and its activation during post-implantation annealing has been studied by a combination of Rutherford backscattering/channeling spectrometry, secondary ion mass spectrometry, X-ray diffraction and 4-point probe measurements. Our results show that, for Sb implanted samples a tensile strain has an important role for dopant behavior. Particularly, increasing the tensile strain in the Si layer from 0 to 0.8% leads to an enhancement of the fraction of incorporated Sb atoms in substitutional sites already during implantation from ~ 7 to 30%. Furthermore, 0.8% strain in antimony doped Si gives ~ 20% reduction in the sheet resistance in comparison to the unstrained sample.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 9, 26 February 2010, Pages 2474–2477
Journal: Thin Solid Films - Volume 518, Issue 9, 26 February 2010, Pages 2474–2477
نویسندگان
A.Yu. Azarov, A. Zamani, H.H. Radamson, L. Vines, A.Yu. Kuznetsov, A. Hallén,