کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1671867 1008924 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Microstructure and mechanical properties of CrAlN/SiNx nanostructure multilayered coatings
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Microstructure and mechanical properties of CrAlN/SiNx nanostructure multilayered coatings
چکیده انگلیسی

Multilayered CrAlN and SiNx films were deposited periodically by radio frequency reactive magnetron sputtering. In the CrAlN/SiNx multilayered coatings, the thickness of CrAlN layer was fixed at 4 nm, while that of SiNx layer was adjusted from 4 nm to 0.3 nm. The dependence of the SiNx layer thickness on the preferred orientation, crystalline behavior and mechanical properties of multilayered coatings were discussed with the aid of XRD patterns and HRTEM. It was demonstrated that amorphous SiNx layer transformed to a crystallized one when the thickness decreased from 4 nm to 0.3 nm. The crystalline SiNx layer grew epitaxially, formed the coherent interface with the CrAlN layer, and the columnar structure was exhibited. The critical layer thickness for the transition from amorphous SiNx to a crystallized one was found to be around 0.4 nm, and maximum hardness of 33 GPa was revealed.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 5, 31 December 2009, Pages 1480–1483
نویسندگان
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