کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1671879 | 1008924 | 2009 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of P addition on the thermal stability and electrical characteristics of NiSi films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Immersion Ni-P deposition is undoubtedly one of the most important catalytic deposition process, due to its simplicity in operation and low equipment cost. In this study, immersion deposited Ni-P films were used to form Ni-silicide films. Ni-P films with a thickness of 100 nm were fabricated by immersing Si(100) substrates in an aqueous deposition solution. Ni-silicide films were then formed by annealing the samples in a furnace at temperatures ranging from 400 °C to 900 °C for 1 h in an argon ambient. Experimental results indicate that a phosphor addition in Ni films increased the transformation temperature of NiSi to NiSi2 to 900 °C. Moreover, the feasibility of enhancing the thermal stability of NiSi by varying the interface energy at the NiSi2/Si interface and the surface energy of a Ni-P-Si capping layer on the NiSi surface is discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 5, 31 December 2009, Pages 1538-1542
Journal: Thin Solid Films - Volume 518, Issue 5, 31 December 2009, Pages 1538-1542
نویسندگان
H.F. Hsu, C.L. Tsai, H.Y. Chan, T.H. Chen,