Synthesis, structural characterization and optical properties of multilayered Yttria-stabilized ZrO2 thin films obtained by aerosol assisted chemical vapour deposition

Multilayered Yttria-stabilized zirconium (YSZ) oxide thin films were synthesized by aerosol assisted chemical vapour deposition onto borosilicate glass substrate. The film consisted of a periodic stack of several YSZ layer pairs. Each pair was composed of layers, a few nanometers thick, of the same composition but different density. Optically the multilayered microstructure correspond to alternating layers of high (dense layer) and low (porous layer) refraction index. The microstructure was analysed by electron and atomic force microscopy. Optical properties were evaluated by reflectance spectroscopy, and associated with the cross sectional microstructure of the films. The measured effective refractive index of the films deviates from bulk value. The discrepancy can be explained by the multilayered structure of the film.