STW gas sensors using plasma-polymerized allylamine

Gas sensors generally consist of two major components: a gas recognition element which provides the specificity and selectivity of the measurement and a physical transducer which translates the gas absorption or desorption event into electronic signal. In this paper, plasma polymerized allylamine (PPAa) film is used as a gas recognition element and a surface transverse wave (STW) device is used as a physical transducer. It is confirmed that STW sensor devices coated with PPAa films provide high sensitivity for moisture. The STW sensor device with a 63 nm PPAa film provided twenty four times higher sensitivity than that of a non-coated STW device. In addition, the chemical structure of PPAa films is characterized by the FT-IR and the contact angle measurement.