Low temperature synthesis of single crystalline ZnO nanorods by oblique angle deposition

The authors report the growth of single crystalline ZnO nanorods by direct current magnetron sputtering in the oblique angle deposition configuration near room temperature. These isolated nanorods have a diameter of ∼ 40 nm, an inter-rod spacing of ∼ 20 nm, and a height of ∼ 100 nm. The nanorods show a (002) orientation along the rod-axis which is normal to the substrate. The low temperature fabrication of single crystal ZnO nanorods may find potential applications in optoelectronics and energy conversion devices.