کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1673085 | 1008943 | 2008 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Electrical, mechanical, and optical properties of the organic-inorganic hybrid-polymer thin films deposited by PECVD
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Hybrid thin films have been deposited on silicon substrates under several conditions such as different annealing temperatures and RF power by plasma enhanced chemical vapor deposition method using single molecular precursors. The result of the FT-IR measurement showed that the plasma polymerized thin films have highly cross-linked density with increasing RF power and annealing temperature. An impedance analyzer was utilized for the measurements of I-V and C-V curves. From the electrical properties measurements, the lowest dielectric constant and best leakage constant were obtained to be 2.26 and 10â 9 A/cm2 at 1 MV/cm, respectively. Also, the mechanical properties of the films were determined with nano-indentation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 516, Issue 11, 1 April 2008, Pages 3577-3581
Journal: Thin Solid Films - Volume 516, Issue 11, 1 April 2008, Pages 3577-3581
نویسندگان
I.-S. Bae, S.-J. Cho, W.-S. Choi, B.-Y. Hong, Y.-J. Kim, Y.-M. Kim, J.-H. Boo,