کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1673569 1518085 2007 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Ellipsometer analysis in the n–k plane
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Ellipsometer analysis in the n–k plane
چکیده انگلیسی

Ellipsometry is an optical analytical method based on measuring the change in polarization state of reflected or transmitted polarized light. A major challenge of the method has been the computation of reflecting surface physical parameters of interest from the raw measured data. This arises because the most common relationship is transcendental and cannot be inverted thus requiring numerical methods. The most popular methods are variations of least squares, for example Levenburg–Marquardt. These methods are plagued by local minima inherent in least squares. The work presented is a description of the geometry of the n–k plane for the case of a single measurement on a single layer film. This geometry lays the groundwork for a set of solution algorithms which are much more powerful and convenient than existing algorithms. It also illustrates the multiple solution problems inherent in least squares methods.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 516, Issues 2–4, 3 December 2007, Pages 119–127
نویسندگان
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