DLC film properties obtained by a low cost and modified pulsed-DC discharge

Surface and bulk properties of diamond-like carbon (DLC) films prepared by using different techniques and under different conditions have been of great concern. The main focus is to reach low total stress, high hardness, high adherence, and low friction coefficient, including the deposition in large area at high growth rate. In this work, DLC films were obtained by using a low cost modified pulsed-DC discharge technique. Different pulse bursts with different pulse widths and delay times were considered. Studies have been carried out in order to match the best set of parameters as mentioned above for different applications, as required in the frame work of our project. The DLC films were deposited onto Si(100) and 304 stainless steel substrates. A thin amorphous silicon interlayer was used to reduce the DLC film's total stress and to improve the films' adhesion to the substrates. A summary of the deposition rates, structural, mechanical, and tribological properties as functions of the pulsed-DC voltage and pulse characteristics will be presented. The results show that the adhesion of the DLC coatings on stainless steel using a thin amorphous silicon interlayer could be improved significantly.