کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1674831 1518118 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Comparison study of ITO thin films deposited by sputtering at room temperature onto polymer and glass substrates
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Comparison study of ITO thin films deposited by sputtering at room temperature onto polymer and glass substrates
چکیده انگلیسی

Indium tin oxide (ITO) thin films have been grown simultaneously onto glass and polymer substrates at room temperature by sputtering from ceramic target. The structure, morphology and electro-optical characteristics of the ITO/glass and ITO/polymer samples have been analyzed by X-ray diffraction, atomic force microscopy, four-point electrical measurements and spectrophotometry. In the selected experimental conditions, the polycrystalline ITO coating shows higher average grain size and higher conductivity, with similar visible transmittance, onto the polymer than onto the glass substrate.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volumes 480–481, 1 June 2005, Pages 129–132
نویسندگان
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