Micrometer-scale fabrication and assembly using focused ion beam

As nanotechnology advances, fabrication techniques based on focused ion beams (FIB) are expected to be useful in manufacturing complex microstructures. We developed a micro-manufacturing method with superior micro-assembly capability by employing FIB milling, FIB-assisted deposition, a rotational-type side-entry stage, and a micro-sampling system. After being machined by FIB milling, micro-samples were assembled into a 25-μm-diameter micro universal joint. A 1-μm-diameter micro-joint was also successfully manufactured in the same manner. Results of TEM observation of the interface between the deposited layer and the substrate suggest that FIB-assisted deposition can be applied to the formation of micro-joints in a micro-machine manufacturing process. This micro-manufacturing method is a powerful tool for the fabrication and assembly of micro-machines.