کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1675242 | 1008977 | 2008 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition](/preview/png/1675242.png)
Indium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, ellipsometric and Hall effect measurements. The effect of the ion beam energy on the properties of the films has been studied. The optical parameters have been obtained by fitting the ellipsometric spectra. It has been found that high quality ITO film (low electrical resistivity and high optical transmittance) can be obtained at low ion beam energy. In addition, the ITO film prepared at low ion beam energy gives a high reflectance in IR region that is useful for some electromagnetic wave shielding applications.
Journal: Thin Solid Films - Volume 516, Issue 7, 15 February 2008, Pages 1365–1369