Studies of oxide-based thin-layered heterostructures by X-ray scattering methods

Examples from studies of oxides-based thin-layers heterostructures will illustrate these methods. In particular, X-ray scattering studies performed on high-k HfO2 and SrZrO3 thin-layers, a (GaAs/AlOx) waveguide, and a ZnO thin-layer are reported.