Structure evolution of the biaxial alignment in sputter-deposited MgO and Cr

A comparison between biaxially aligned MgO and Cr concerning the microstructure and crystallographic texture is discussed. A correlation between the sputter deposition parameters on the biaxial alignment of both materials is observed. Both materials have a columnar V-shape structure with a faceted surface, corresponding to zone T of the well known structure zone model of Thornton. The MgO layers exhibit a [111] out-of-plane orientation, while Cr layers have an [100] preferential orientation. MgO as well as Cr show a strong in-plane alignment.