Angular dependent luminescence behavior in one-dimensional Si-based microcavities

One-dimensional all solid-state microcavities (MCs) based on amorphous silicon-nitride films have been fabricated in plasma enhanced chemical vapor deposition system. Spectral narrowing and enhancement of room temperature photoluminescence due to the modulation effect in MCs were observed. The modulated luminescence behavior in MCs was further studied by angular dependent luminescence measurements. The distinct cavity mode energy shifting and variation of luminescence intensity with the detect angle were observed, which reflected the directionality of emission properties in the planar MCs. The deviation of the measured angular dependent energy shifting from the theory prediction was discussed as being related to the structure properties of the MCs.