کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1675987 | 1518089 | 2006 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Structural and optical properties of direct current sputtered zinc aluminum oxides with a high Al concentration
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Zinc aluminum oxide films were deposited by reactive dc magnetron sputtering from Zn/Al target containing 30 wt.% Al. Sputtering was carried out on glass and Si(100) substrates held at room temperature. The effect of oxygen flow on structural and optical properties was studied. The properties of the films were strongly dependent on oxygen flow. Amorphous, highly transparent and very smooth films were deposited in the oxidic mode while opaque and high surface roughness films were deposited in the metallic mode. The decrease in refractive index upon increasing oxygen flow is related to both the decrease in density as revealed by X-ray reflectometry and the increase in porosity. The band gaps obtained were in between the band gaps of Al2O3 and ZnO.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 513, Issues 1â2, 14 August 2006, Pages 64-71
Journal: Thin Solid Films - Volume 513, Issues 1â2, 14 August 2006, Pages 64-71
نویسندگان
S.H. Mohamed, R. Drese,