Optical and electrical properties of p-type transparent conducting CuAlO2 thin film

P-type transparent conducting CuAlO2 thin films were prepared by e-beam evaporation and wet-oxidation technique. CuAlO2 film was preferentially (006) oriented after wet-oxidation. The transmittance varied from 20 to 85% and the resistivity varied from 5 × 10− 3 to 4 Ω cm with wet-oxidation conditions. The nature of p-type films was confirmed by the positive hall coefficient. Optical band gap was estimated to be in the range of 3.96–4.20 eV. These behaviors were due to the decrease of oxygen deficient state in the film as oxidation progresses. Microstructural observations of films showed smooth morphology with 23.2–29.7 Å rms roughness.