کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1676351 | 1008995 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Field-emission characteristics of diamond-like amorphous carbon films deposited by mixed gas (N2 or H2) controlled i-C4H10 supermagnetron plasma
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Field-emission characteristics of diamond-like amorphous carbon films deposited by mixed gas (N2 or H2) controlled i-C4H10 supermagnetron plasma Field-emission characteristics of diamond-like amorphous carbon films deposited by mixed gas (N2 or H2) controlled i-C4H10 supermagnetron plasma](/preview/png/1676351.png)
چکیده انگلیسی
Diamond-like amorphous carbon (DAC) films were deposited for field-emission application using supermagnetron plasma by mixing N2 or H2 in i-C4H10 gas at the upper and lower electrode rf powers (UPRF/LORF) of 800 W/100-800 W. At an 800 W/800 W, the N2 (0-80%) gas-mixed DAC films showed an emission threshold electric field (ETH) of 19 V/μm. At the 800 W/100 W, the H2 (20%) gas-mixed DAC film showed low ETH's of 13 V/μm, respectively. The moderate reduction of CC and CN double bonds by the decrease of LORF from 800 W to 100 W was found to be effective to lower ETH.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 515, Issue 12, 23 April 2007, Pages 5142-5146
Journal: Thin Solid Films - Volume 515, Issue 12, 23 April 2007, Pages 5142-5146
نویسندگان
Haruhisa Kinoshita, Manabu Yamashita,