کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1676439 1008997 2007 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Preparation of micropatterned poly(silsesquioxane) thin films using adamantylphenol molecules
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Preparation of micropatterned poly(silsesquioxane) thin films using adamantylphenol molecules
چکیده انگلیسی

Poly(methyl silsesquioxane) (PMSSQ) thin films with micropatterned surface structures have been prepared by use of adamantylphenol molecules as a photo-thermal sensitive moiety together with UV lithographic technique and mild heating process. Initially, PMSSQ films form positive patterns of micronscale due to the film densification triggered by photooxidation and photopolymerization of doped moieties within UV exposed region. With thermal treatment, negative patterns from these pre-patterned films are formed by the difference of polycondensation rates between non-exposed regions and irradiated areas without additional developing or etching steps. This structural transformation of PMSSQ thin films was investigated using Fourier-transformed infrared spectroscopy, ultraviolet visible spectroscopy, X-ray photoelectron spectroscopy, Auger electron spectroscopy, and field emission scanning electron microscopy.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 515, Issue 11, 9 April 2007, Pages 4603–4608
نویسندگان
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