Optical properties of nanocrystalline La2O3 dielectric films deposited by radio frequency magnetron sputtering

La2O3 thin films were successfully synthesized by r. f. magnetron sputtering technique. The effect of power, deposition time and substrate temperature on the formation and optical properties of the films was investigated. X-ray diffraction (XRD) studies revealed the formation of hexagonal phased La2O3 thin films. The influence of sputtering parameters on chemical composition and surface species was studied by X-ray photoelectron spectroscopy (XPS). The optical properties were investigated in the wavelength range of 200-1100 nm. The samples were modelled as a three-phase optical model. Optical constants were calculated at 2 eV from classical dispersion model based on the single Lorentz for dielectric materials.