Vacuum-ultraviolet ellipsometry spectra and optical properties of Ba(Zr,Ti)O3 films

In this work, we determine the dielectric functions of multi-target, reactively sputtered Ba(Zr0·2Ti0.8)O3 by spectroscopic ellipsometry in the photon energy range from 0.8 to 8.7 eV. Based on this data, we discuss the interband transition energies and the spectral dependencies of the refractive index and the absorption coefficient.