کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7938436 | 1513180 | 2018 | 21 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Memory improvement with high-k buffer layer in metal/ SrBi2Nb2O9/Al2O3/silicon gate stack for non-volatile memory applications
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We report the structural and electrical properties of Al/SBN/Al2O3/Silicon gate stack for non-volatile memory applications. RF magnetron sputtering was used for thin film deposition of SrBi2Nb2O9, Al2O3 and their stack on the silicon substrate. Structural characterization using X-Ray Diffraction (XRD) show the perovskite structure of SBN film annealed in the temperature range of 500-800â¯Â°C. Multiple angle ellipsometric analysis carried out on the deposited film annealed at different temperatures shows the refractive index (n) in the range of 2.0941-2.1804 for the SBN and 1.7-1.73 for sputtered Al2O3. Metal-Ferroelectric-Semiconductor (MFeS), Metal-Ferroelectric-Metal (MFeM) and Metal-Ferroelectric-Insulator-Semiconductor (MFeIS) structures were fabricated to investigate the memory window, leakage current density, hysteresis and fatigue characteristics. The Effect of introducing Al2O3 buffer layer, its thickness and its annealing temperature on the structural and electrical properties were investigated. The capacitance-voltage (C-V) data shows the memory window improvement from 1.977â¯V for MFeS to 2.88â¯V for MFeIS structure with 10â¯nm sputtered Al2O3 buffer layer. MFeI(10nm)S structures shows leakage current density in the range of nA-cmâ2 with no fatigue for the iteration cycles 1011.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Superlattices and Microstructures - Volume 121, September 2018, Pages 55-63
Journal: Superlattices and Microstructures - Volume 121, September 2018, Pages 55-63
نویسندگان
Prashant Singh, Rajesh Kumar Jha, Rajat Kumar Singh, B.R. Singh,