Effect of F and Nb co-doping on structural, electrical and optical properties of spray deposited tin oxide thin films

F and Nb co-doped tin oxide films were deposited from monobutyltin trichloride (C4H9SnCl3) on glass substrates at 470 °C by spray pyrolysis. The evolution of the film structure and morphology was investigated by X-ray diffraction and scanning electron microscopy, respectively. All the films were a single phase with polycrystalline, exhibiting a tetragonal cassiterite structure with (200) orientation. The introduction of F and Nb contributed to the growth of the films towards (200) crystal orientation and the formation of pyramidal shape particles with (101) twin planes. Resistivity, carrier concentration, and Hall mobility values of 3.62 × 10−4 Ω cm, 7.463 × 1020 cm−3, and 27.8 cm2 V−1 s−1, respectively, were achieved in the films for a dopant concentration of 20 at.% F and 1 at.% Nb in the precursor solution. Also, the transmittance of all the films in the visible range reached about 80% and the infrared reflectivity was oscillated between 92 and 96%.