کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8035830 | 1518058 | 2013 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth and characterization of polar and nonpolar ZnO film grown on sapphire substrates by using atomic layer deposition
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Growth and characterization of polar and nonpolar ZnO film grown on sapphire substrates by using atomic layer deposition Growth and characterization of polar and nonpolar ZnO film grown on sapphire substrates by using atomic layer deposition](/preview/png/8035830.png)
چکیده انگلیسی
We investigated the electrical and the optical properties of polar and nonpolar ZnO films grown on sapphire substrates with different crystallographic planes. High resolution X-ray results revealed that polar c-plane (0001), nonpolar m-plane (10-10) and a-plane (11-20) ZnO thin films were grown on c-plane, m- and r-sapphire substrates by atomic layer deposition, respectively. Compared with the c-plane ZnO film, nonpolar m-plane and a-plane ZnO films showed smaller surface roughness and anisotropic surface structures. Regardless of ZnO crystal planes, room temperature photoluminescence spectra represented two emissions which consisted of the near bandedge (~Â 380Â nm) and the deep level emission (~Â 500Â nm). The a-plane ZnO films represented better optical and electrical properties than c-plane ZnO, while m-plane ZnO films exhibited poorer optical and electrical properties than c-plane ZnO.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 546, 1 November 2013, Pages 114-117
Journal: Thin Solid Films - Volume 546, 1 November 2013, Pages 114-117
نویسندگان
Ki-Wook Kim, Hyo-Soo Son, Nak-Jung Choi, Jihoon Kim, Sung-Nam Lee,