Cross-sectional X-ray nanobeam diffraction analysis of a compositionally graded CrNx thin film

Synchrotron X-ray nanodiffraction is used for the position-resolved characterization of a nanocrystalline graded CrNx thin film deposited with continuously increasing nitrogen content over the 6 μm film thickness. The diffraction experiment is performed in wide angle X-ray scattering transmission geometry using a monochromatic beam of 100 nm in diameter. The results reveal a complex microstructure and texture evolution in hexagonal Cr2N and cubic CrNx phases as well as a compressive strain increase in CrNx towards the film surface.