Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration

► Cylindrical magnetrons can be well used in a sputter up configuration. ► Cylindrical magnetrons were used to create transparent oxide layers. ► Metallic mode reactive sputtering yields bulk-like refractive indexes. ► Ta2O5 and SiO2 growth is driven by different parameters.