Influence of Si concentration on electrical and optical properties of room temperature ZnO:Si thin films

► Room temperature deposition of transparent and conductive ZnO:Si (SZO) thin films ► Low resistivity of 3.3 × 10− 4 Ω cm for 1.5 at.% of Si in SZO thin films ► Comparable electrical performances as the state of the art In2O3:Sn