Stress evolution in B4C and Cr mono-layer and B4C/Cr multilayer films with variable layer thickness for neutron detectors

► The low residual stress of thick B4C film is achieved by inserting the Cr layers. ► The residual stresses of B4C/Cr multilayer films depend on their interface stress. ► The interface stress is dependent on the B4C layer thickness in multilayer. ► The interface stress is independent on the Cr layer thickness in multilayer.