کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812480 | 1518114 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Low temperature chemical vapor deposition of Co thin films from Co2(CO)8
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
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چکیده انگلیسی
Cobalt thin films were deposited on the Si(100) substrates with temperatures ranging from 60 °C to 250 °C using chemical vapor deposition with a metallorganic Co2(CO)8 precursor. After Ar sputtering of the surface of the films, X-ray photoelectron spectroscopy (XPS) showed negligible O peak for all samples investigated. Analysis of high-resolution XPS Co and C peaks showed that a Co-C bond exists at high deposition temperatures of 140 and 160 °C. But pure Co peaks with no Co carbide bonding were observed for films deposition at 70 and 80 °C. Two growth rate maxima were observed at substrate temperatures of 120 and 220 °C using the Rutherford backscattering spectrometry. The two maximum growth rates are due to the transition from surface reaction controlled growth (60 to 140 °C) to mass-transport controlled growth (150 to 220 °C). The decrease of growth rate after the maximum growth rate was believed to come from a change in the decomposition pathways and the sticking coefficient.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 485, Issues 1â2, 1 August 2005, Pages 95-100
Journal: Thin Solid Films - Volume 485, Issues 1â2, 1 August 2005, Pages 95-100
نویسندگان
D.-X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J.J. Senkevich, G.-C. Wang, T.-M. Lu,