کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9812564 1518115 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Characterization of thermal conductivity in thin film multilayered membranes
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Characterization of thermal conductivity in thin film multilayered membranes
چکیده انگلیسی
In this paper we propose a novel approach for the thermal conductivity determination in thermal membrane-based devices. In the presented methodology, the fitting of experimental and simulated thermal dissipation of two resistive elements is used to characterize both the materials composing the membrane structure and the material used in the heating element patterning. The determination of this parameter, usually disregarded in most of the analysis, leads to a complete characterization of the structure and represents an improvement, as a better accuracy in the thermal properties of the membrane under study can be achieved. To demonstrate its effectiveness, the method has been applied to a already-fabricated flow sensor structure.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 484, Issues 1–2, 22 July 2005, Pages 328-333
نویسندگان
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