کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9812698 | 1518117 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Characterization of hydrogenated amorphous carbon nitride particles and coatings obtained in a CH4/N2 radiofrequency discharge
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Hydrogenated amorphous carbon nitride (a-CNx:H) particles and coatings have been prepared in a CH4/N2 13.56 MHz radiofrequency discharge. Particles and films have been examined by Scanning Electron Microscopy (SEM) and by infrared (IR) absorption spectroscopy for different nitrogen contents. SEM micrographs show that the dust particles are spherical with diameters in the range 0.2-4 μm. The surface morphology of the particles is strongly modified with the increase of the nitrogen content in the gas mixture. In the particle and film IR spectra, four predominant absorption bands have been observed. They reveal the presence of C-H, CC, CN and/or N-H (1300-1800 cmâ1), -CN and -NC (2000-2300 cmâ1), C-H (2800-3100 cmâ1) and N-H and/or O-H (3200-3600 cmâ1) bonds. These absorption bands are studied in order to determine the influence of the nitrogen incorporation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 482, Issues 1â2, 22 June 2005, Pages 226-231
Journal: Thin Solid Films - Volume 482, Issues 1â2, 22 June 2005, Pages 226-231
نویسندگان
Jérémy Pereira, Isabelle Géraud-Grenier, Véronique Massereau-Guilbaud, André Plain,